论文部分内容阅读
Structure and Properties of Al-Doped Zin c Oxide Films Deposited on Glass Substrates by Magnetron Sp
【机 构】
：
Wuhan University of Technology, Wuhan city, China
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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