【摘 要】
：
FeCoN soft magnetic thin films are prepared by using the reactive direct-current magnetron sputtering technique.It is found that the addition of N2 can reduce t
【机 构】
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Key Laboratory of Education Ministry on Magnetism and Magnetic Material,Research Institute of Magnet
【出 处】
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Chinese Physics B
论文部分内容阅读
FeCoN soft magnetic thin films are prepared by using the reactive direct-current magnetron sputtering technique.It is found that the addition of N2 can reduce the coercivity of the FeCoN film,and excellent soft magnetic properties can be obtained when the ratio of N2 flow to total gas flow is 10%.The influences of texture,grain size,and stress on the magnetic properties and the high-frequency behaviors of the films are also discussed.
FeCoN soft magnetic thin films are prepared by using the reactive direct-current magnetron sputtering technique. It is found that the addition of N2 can reduce the coercivity of the FeCoN film, and excellent soft magnetic properties can be obtained when the ratio of N2 flow to total gas flow is 10%. The influences of texture, grain size, and stress on the magnetic properties and the high-frequency behaviors of the films are also discussed.
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