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器件稳健性设计本质上是一个多个目标的优化问题 .将实验设计和响应表面方法相结合可用来满足减少所需的 TCAD模拟次数的强烈需求 .然而对一些非线性问题 ,RSM模型的误差可能会大到影响设计结果的有效性 .为找到可行空间 ,提出了一种考虑 RSM模型误差时 ,面向目标的多代设计方法 .通过在由当前代中的 RSM模型结果所得到的有希望空间中增加设计 ,使得模型误差减小并得到可行空间 .对 FIBMOS例子的结果显示本方法是有效的 .
Device robustness design is essentially a multi-objective optimization problem.The combination of experimental design and response surface methodology can be used to meet the strong demand to reduce the number of TCAD simulations required.However, for some nonlinear problems, errors in the RSM model may Which will greatly affect the validity of the design results.In order to find a feasible space, a multi-generation target-oriented design method considering the error of RSM model is proposed.With the promising space obtained by the RSM model results in the current generation Increasing the design reduces the model error and achieves feasible space.The result of FIBMOS example shows that this method is effective.