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介绍为大型超高真空系统(如加速器)研制的、基于现场总线的智能超高真空监控节点即冷阴极电离真空计的设计。该真空计带有符合CAN协议的现场总线接口、RS485/RS232C 以及用于联锁保护快速响应的接口,可有效地驱动多种国内外规管,量程范围是 1 × 10-2 Pa- 1.3 X 10-8 Pa,在超高真空测控领域极有特色。由于将CAN总线接口和快速联锁报警接口引入超高真空计,使其特别适用于大型超高真空监控系统。
Introduced for large ultra-high vacuum system (such as accelerator) developed based on the fieldbus intelligent ultra-high vacuum monitoring node that is cold cathode ionization vacuum gauge design. The gauge has fieldbus interface compliant with CAN protocol, RS485 / RS232C and interface for fast interlocking of interlock protection, which can effectively drive a variety of domestic and foreign regulations. The measuring range is 1 × 10-2Pa-1. 3 X 10-8 Pa, extremely high in the field of vacuum measurement and control. Due to the CAN bus interface and quick interlock alarm interface into the ultra-high vacuum gauge, making it particularly suitable for large ultra-high vacuum monitoring system.