假设扩散泵的性能是以工作液的分子和被抽气体之间的碰撞为根据,通过一些合理假设,按照波耳兹曼方程可以推导出抽气作用方程。抽气作用方程可以变换成二阶偏微分方程,其泵体的形状可作为边界值问题,只有通过扩散油气理论,才能提出真正有实际价值的边值问题。能够用公式表示出来 It is assumed that the performance of the diffusion pump is based on the collision between the molecules of the working fluid and the gas being drawn. By some reasonable assumptions, the pumping equation can be derived from the Boltzmann equation. The pumping action equation can be transformed into second-order partial differential equation. The shape of the pump body can be used as the boundary value problem. Only by diffusing the oil-gas theory can we propose the real-valued boundary value problem. Can be expressed as a formula