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提出一种基于正切关系和相位调制技术的动态小角度测量方法.使用双棱镜组成干涉测量臂引导两束平行光至分束棱镜处干涉,通过提取携带被测信息的干涉信号的相位实现动态的小角度测量.由于采用位置探测器(PSD)对测量臂中两平行光束的间距进行测量,简化了测量方程,消除了装置中双棱镜必须对称放置的要求.通过正弦地改变半导体激光器的注入电流在时域内实现对干涉信号的相位调制,形成准外差干涉测量模式,提高了光程差的测量精度.实验验证了该方法的可行性,并讨论了影响小角度测量精度的误差因素.研究结果表明,基于该方法的动态小角度的重复测量精度可达到10-8rad数量级.
A new method based on tangent relation and phase modulation technique is proposed in this paper.It uses two prisms to form interference measuring arm to guide the interference of two parallel beams to the beam splitting prism and realize the dynamic state by extracting the phase of the interference signal carrying the measured information Small angle measurement. The use of a position detector (PSD) to measure the distance between two parallel beams in the measurement arm simplifies the measurement equation and eliminates the need for symmetrical placement of the biprisms in the device. By sinusoidally changing the injection current of the semiconductor laser The phase modulation of the interference signal is realized in the time domain to form the quasi-heterodyne interference measurement mode and improve the measurement accuracy of the optical path difference.The feasibility of this method is verified by experiments and the error factors that affect the accuracy of the small-angle measurement are discussed. The results show that the accuracy of the repeated measurement of the dynamic small angle based on this method can reach the order of 10-8rad.