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低温泵是利用低温吸附而达到获取真空的装置。与其他真空获取设备相比,其具有无油、低振动等优势。活性炭是低温泵常用的一种吸附剂,其对低温泵的工作性能起着关键性的作用。根据真空度的需求,一般要求低温泵对氢的抽速较大。这就需要适合于氢的吸附的活性炭。椰壳活性炭的孔隙大小对氢的吸附比较适合。本文首先对活性炭进行了预处理,用扫描电子显微镜和低温吸附仪对其结构和吸附性能进行了表征,并将其用于低温泵的吸附镇,发现安装了经过处理活性炭的低温泵其抽气速率和极限真空都有一定的提高。
Cryogenic pump is the use of low temperature adsorption to achieve the vacuum device. Compared with other vacuum acquisition equipment, it has the advantages of oil-free, low vibration and so on. Activated carbon is an adsorbent commonly used in cryogenic pumps, which plays a key role in the performance of cryogenic pumps. According to the requirements of the degree of vacuum, the general requirement of cryogenic pump hydrogen pumping speed larger. This requires activated carbon suitable for the adsorption of hydrogen. Coconut shell activated carbon pore size of hydrogen adsorption more suitable. In this paper, the activated carbon was pretreated firstly, its structure and adsorption performance were characterized by scanning electron microscopy and cryogenic adsorption, and used in the adsorption town of cryogenic pump. It was found that the activated carbon was installed in the cryogenic pump to exhaust Rate and ultimate vacuum have a certain increase.