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介绍了用湿法化学腐蚀的方法制备GaAs晶体微型电光探针 .用光学显微镜和扫描电子显微镜观察了探针形貌 .微探针为金字塔形 ,底座是边长为 2 0 μm的正方形 ,尖端尺寸在 2 μm左右 .侧面比较光滑 ,棱角分明 .微型电光探针整体尺寸很小 ,在外电光检测系统中可以显著降低对被测电场的影响 ,从而提高测量精度 .
The preparation of GaAs crystal micro electrooptic probe by wet chemical etching was introduced.The morphology of the probe was observed by optical microscope and scanning electron microscope.The pyroelectric microprobe was a square pyramid with the base of 20 μm square and the tip The size is about 2 μm, the side is smooth and the edges and corners are clear.The overall size of the miniature electro-optical probe is very small, which can remarkably reduce the influence on the electric field to be measured in the external electro-optical detection system so as to improve the measurement accuracy.