In order to investigate the influence of processing parameters on the granularity distribution of superalloy powders during the atomization of plasma rotating electrode processing (PREP), in this paper FGH95 superalloy powders is prepared under different processing conditions by PREP and the influence of PREP processing parameters on the granularity distribution of FGH95 superalloy powders is discussed based on fractal geometry theory. The results show that with the increase of rotating velocity of the self-consuming electrode, the fractal dimension of the granularity distribution increases linearly, which results in the increase of the proportion of smaller powders. The change of interval between plasma gun and the self-consuming electrode has a little effect on the granularity distribution, also the fractal dimension of the granularity distribution changed a little correspondingly. In order to investigate the influence of processing parameters on the granularity distribution of superalloy powders during the atomization of plasma rotating electrode processing (PREP), in this paper FGH95 superalloy powders is prepared under different processing conditions by PREP and the influence of PREP processing parameters on the results show that with the increase of rotating velocity of the self-consuming electrode, the fractal dimension of the granularity distribution increases linearly, which results in the increase of the proportion of smaller powders. The change of interval between plasma gun and the self-consuming electrode has a little effect on the granularity distribution, also the fractal dimension of the granularity distribution changed a little correspondingly.