VLSI和微细加工从晶体管向IC→LSI→VLSI的不断发展是维持现代电子学基础的产业革命,它带来了巨大的变革,所谓“半导体冲击”的影响是深远的。作为晶体管乃至VLSI的原料一硅,是地球上最丰富的石头的主要成分。昭和四十年代初期,在数毫米见方的硅芯片上充其量能集成数十个晶体管,而现在,存储器领域的主要产 The continuous development of VLSI and microfabrication from transistors to ICs → LSIs → VLSIs is an industrial revolution that has underpinned the foundations of modern electronics. It has brought about tremendous changes. The impact of so-called “semiconductor shocks” is far-reaching. Silicon, the raw material for transistors and even VLSI, is the main component of the most abundant earth on the earth. In the early 1940s, tens of transistors could be integrated in a few millimeters square of silicon, and now, the main memory area