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纳米级二维激光外差干涉仪的设计陈晓梅曹航周自力亓爱会（长城计量测试技术研究所北京１０００９５）本文提出的一种５０μｍ测量范围内，２ｎｍ不确定度、０．５ｎｍ分辨率的二维激光外差干涉仪的设计是为建立国防项目，而预先研究的关键技术之一，即激光外差干涉测量仪...
Design of Nanoscale 2D Laser Heterodyne Interferometer Chen Xiaomei Cao Hang Zhou Zili Ai Aihui (Institute of Measurement and Testing Technology, Great Wall Beijing 100095) This paper presents a two-dimensional laser out-of-plane (2D) laser with 2nm uncertainty and 0.5nm resolution in the measurement range of 50μm. The design of a poor interferometer is one of the key technologies for establishing a national defense project, pre-studied, ie, a laser heterodyne interferometer ...