高分子功能薄膜因质量轻、柔韧性好及易于加工等特点而在新型微纳光电器件上有很好的潜在应用前景。由于存在高温热致烧蚀或分解,常规的蒸发镀膜和溅射镀膜等方法无法用来制备高分子聚合物薄膜,而一般的溶液旋涂和滴涂技术,又存在薄膜易污染、孔洞多及溶剂残留等问题。近年来出现了在真空下通过溶液喷射制备聚合物薄膜的方法,该方法是将有机聚合物溶液在高压下经喷嘴直接喷射到真空室中形成细小雾滴并沉积到基片上形成薄膜。真空环境和加热可使溶剂快速蒸发,进而能够避免大量空气和溶剂在薄膜中的残留,具有操作简单且能制备多层或梯度结构复合功能薄膜的特点。本文对相关研究进行了综述,发现该方法尚存在成膜厚度不易监测,成膜影响因素缺乏系统的理论分析等问题,亟待进一步研究解决。 Due to its characteristics of light weight, good flexibility and easy processing, the polymer functional film has good potential application prospect in the new micro / nano photoelectric device. Due to the high temperature thermal ablation or decomposition, conventional methods such as evaporation and sputter coating can not be used to prepare polymer films. However, conventional solution spin-on and drop-coating techniques have the disadvantages of easy film contamination, Solvent residue and other issues. In recent years, there has been a method for preparing a polymer film by solution jetting under a vacuum, in which an organic polymer solution is directly injected into a vacuum chamber under high pressure into a vacuum chamber to form a fine mist and deposited on a substrate to form a thin film. The vacuum environment and the heating can rapidly evaporate the solvent, so that a large amount of air and solvent can be avoided from remaining in the film, and the utility model has the characteristics of simple operation and capable of preparing multi-layer or gradient structural composite functional films. This paper summarizes the related research and finds that there are still some problems such as the film thickness is not easy to be monitored and the influencing factors of the film formation are lack of systematic theoretical analysis, which needs to be further studied and solved.