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低温泵利用低冷凝和捕集来抽气,它不给被抽容器带来污染,因而是十分清洁的泵。然而早期的低温泵需用液氮或昂贵的液氦来制冷,这就限制了它的应用。现代的低温泵用闭循环小型制冷机来获得抽气所需的低温,完全省去了液氦和液氮,这就大大降低了运转成本。此外,制冷机使用的压缩机寿命较长,一般在运转9000至10000小时后只需花费半小时左右简单地更换一下吸
The cryogenic pump uses low condensation and trapping to evacuate, it does not pollute the pumped container and is therefore a very clean pump. However, early cryogenic pumps required liquid nitrogen or expensive liquid helium to cool, limiting their use. Modern cryogenic pumps use closed-loop miniature refrigerators to achieve the low temperatures required for extraction, eliminating the need for liquid helium and liquid nitrogen altogether, which significantly reduces operating costs. In addition, the use of refrigerators compressor longer life, usually operating 9000 to 10000 hours after only about half an hour or so to simply replace the suction