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研究了以Mo为衬底在Si(100)基片上沉积SmCo7永磁薄膜的高温磁学性能。结果表明,高温老化处理对薄膜的晶体结构和磁性能没有显著影响。根据趋近饱和定律和薄膜的高温磁化曲线,获得了磁晶各向异性常数K1随温度的变化关系。该关系说明随着温度的增加,SmCo晶粒的取向在一定程度上受到了破坏。此外,薄膜磁性能随温度的变化关系适当,可以满足在微电子机械系统(MEMS)中的应用。
The high temperature magnetic properties of SmCo7 permanent magnet films deposited on Si (100) substrates with Mo as substrate were investigated. The results show that high temperature aging treatment has no significant effect on the crystal structure and magnetic properties of the films. According to the law of approaching saturation and the high-temperature magnetization curve of the film, the change of magnetocrystalline anisotropy constant K1 with temperature is obtained. This relationship shows that as the temperature increases, the orientation of the SmCo grains is somewhat destroyed. In addition, the magnetic properties of thin films vary with temperature and are suitable for applications in microelectromechanical systems (MEMS).