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针对高精度球面检测中球面的调整误差影响,分别研究了波前离焦和倾斜所引入的Zernike像差项,并以此为基础,提出了基于Zernike系数的高精度球面调整误差校正方法.利用Zygo干涉仪对大数值孔径的待测球面进行了检测,实验中对待测球面同时引入波前离焦和倾斜误差,再分别运用所提出的校正方法和传统的消倾斜离焦校正方法得到波面数据并进行对比,进而验证了所提出的校正方法的可行性.实验结果表明,利用该方法可有效地校正大数值孔径球面存在调整误差时所引入的球面像差,并且实验中的校正精度达到了0.002λ(λ为检测光波长).提出的基于Zernike系数的球面调整误差校正方法可降低对于调节机构的精度以及检测人员的经验要求,在高精度球面检测中具有非常高的实际应用价值.
Aiming at the adjustment errors of sphere in high-precision spherical detection, the Zernike aberration caused by defocus and tilt in wavefront are studied separately, and based on which, a high precision spherical adjustment error correction method based on Zernike coefficient is proposed. Zygo interferometer for the large numerical aperture of the sphere to be tested were detected in the experiment to the ball while the introduction of wavefront defocus and tilt error, and then use the proposed correction method and the traditional deskew defocus correction method to obtain wavefront data And then verify the feasibility of the proposed correction method.Experimental results show that this method can effectively correct the spherical aberration introduced by the adjustment error of large numerical aperture spherical and the accuracy of the experiment is up to 0.002λ (λ is the wavelength of the detection light) .The proposed spherical adjustment error correction method based on the Zernike coefficient can reduce the precision of the adjustment mechanism and the testing personnel’s experience requirements, and has very high practical value in high-precision spherical detection.