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采用CO2激光直写烧蚀加工技术在聚甲基丙烯酸甲酯(PMMA)基片表面加工微通道,分析了CO2激光输出功率和激光束移动速度对加工质量的影响。选用4.5W输山功率和76.2mm移动速度,在30s内加工了水力直径为100μm的微通道。在进行微通道的大批量、快速加工时,CO2激光直写烧蚀加工技术具有较高的工艺稳定性,工艺流程简单,可随时根据实验需要对微通道结构进行调整和再加工。微通道的激光拉曼光谱与PMMA基片相同,保证了微通道和盖片对聚合酶链式反应(PCR)物化学影响的一致性。虽然徽通道边缘存在少量重铸物。但不会影响热压键合效果,芯片能够满足PCR扩增中的压力与密封要求。使用这种芯片实现了180bp拟南芥脱氧核糖核酸(DNA)片段的PCR扩增,扩增效果与使用常规PCR仪相当,验证了采用CO2激光直写烧蚀方法加工PMMA基连续流式PCR微流控芯片的可行性。
Micro-channels were fabricated on the surface of polymethylmethacrylate (PMMA) substrates by CO2 laser direct writing ablation. The effects of CO2 laser output power and laser beam moving velocity on the processing quality were analyzed. Select 4.5W power transmission and mountain speed of 76.2mm, within 30s processed hydraulic diameter of 100μm microchannels. When carrying out large-volume and rapid processing of microchannels, CO2 laser direct writing ablation processing technology has high process stability, simple process flow, and the micro-channel structure can be adjusted and reprocessed at any time according to the experiment needs. The laser Raman spectra of the microchannels are the same as that of the PMMA substrate, ensuring the consistency of microchannels and coverslips in the chemistry of polymerase chain reaction (PCR). Although there is a small amount of recast on the edge of the emblem channel. But will not affect the effect of hot bonding, the chip can meet the pressure in the PCR amplification and sealing requirements. Using this chip, PCR amplification of 180bp Arabidopsis DNA fragment was achieved. The amplification effect was equivalent to that of the conventional PCR instrument. It was verified that the continuous flow PCR microarray of PMMA based on CO2 laser direct writing ablation Flow control chip feasibility.