论文部分内容阅读
为了均匀显影大幅面激光全息光刻胶板,获得最佳衍射效果,使用自动喷淋显影工艺技术。文章讨论了显影方法及工艺对显影槽深均匀性的影响,包括激光的曝光能量,显影药液的浓度、温度、时间及胶板入液先后时间。通过多种显影方法比较,自动喷淋显影可以克服人工显影操作引起的时间、平稳性误差导致大幅面全息光刻胶母版显影不均匀、光栅槽型、终点控制和重复性差等缺陷,获得最佳显影效果。
For uniform development of large-format laser holographic photoresist plate, get the best diffraction effect, the use of automatic spray development technology. The article discusses the influence of developing method and process on the deep uniformity of developing tank, including the exposure energy of laser, the concentration of developing solution, temperature, time and the time of entering into plastic. By a variety of development methods, automatic spray development can overcome the time caused by the manual development operation, the error of smoothness leads to uneven development of large format holographic photoresist master, grating groove, end point control and poor repeatability, and the most Good development effect.