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针对高功率激光装置,光学元件表面不同分布形态的多个缺陷引起的子光束,在传输过程中会相互干涉叠加,引起光束质量发生复杂变化,因此有必要对缺陷的相对位置关系加以规范。基于光的衍射传输理论,研究了光学元件表面存在不同空间分布的划痕时光场调制的变化,以及划痕深度对调制光束近场分布的影响。结果表明,元件前后表面存在平行或垂直划痕时均会比单一划痕产生更加严重的光束调制,最大调制度可增至1.5倍,且划痕具有更严格的深度要求。研究结果为光学元件图形制备标准的补充及高功率激光装置大口径光学元件表面缺陷指标的确定提供了重要参考。
For high-power laser devices, the sub-beams caused by multiple defects with different distributions on the surface of the optical element interfere with each other during the transmission and cause complex changes of the beam quality. Therefore, it is necessary to regulate the relative position of the defects. Based on the theory of optical diffraction transmission, the changes of the optical field modulation during the scratches with different spatial distributions on the surface of the optical element and the influence of the scratch depth on the near-field distribution of the modulated beam are studied. The results show that the presence of parallel or perpendicular scratches on the front and back surfaces of the component will result in more severe beam modulation than a single scratch, with the maximum modulation up to 1.5 times and the scratch with stricter depth requirements. The results provide an important reference for the standard supplement of optical element pattern preparation and the determination of the surface defect index of large-aperture optical elements in high-power laser devices.