根据高稳定性半导体激光(LD)泵浦单块非平面环形腔(NPRO)单频激光器对于功率稳定性和频率稳定性的要求,设计并研制了一套高精度的精密温控系统。该系统基于模拟比例-积分-微分(PID)控制原理,采用程控调节P和PI的方式,通过对半导体制冷器(TEC)的驱动控制,实现在-10~+70℃范围内对LD和NPRO单块晶体温度的精确控制,控温精度达±0.01℃。采用该温控系统的LD泵浦1645nm NPRO单频激光器,30min内相对波长稳定性达8.32×10-7。 According to the requirement of power stability and frequency stability of NPRO single-frequency lasers pumped by a highly stable semiconductor laser (LD), a set of precise temperature control system is designed and developed. The system is based on the principle of analog proportional-integral-derivative (PID) control and adopts the method of program-controlled P and PI. Through the drive control of the semiconductor cooler (TEC) Accurate control of the temperature of a single crystal, temperature control accuracy of ± 0.01 ℃. The temperature control system of LD pumped 1645nm NPRO single-frequency laser, 30min relative wavelength stability of 8.32 × 10-7.