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利用X射线衍射技术研究了用喷涂法生长的SnO_2膜的晶体结构,计算了晶格常数,讨论了成膜温度与SnO_2膜晶粒大小的关系,分析了SnO_2膜生长的择优取向,并用扫描电镜观察了SnO_2膜断面和表面形貌。
The crystal structure of SnO_2 film grown by spray coating was studied by X-ray diffraction and the lattice constant was calculated. The relationship between the film formation temperature and the grain size of SnO_2 film was discussed. The preferred orientation of SnO_2 film growth was analyzed. Scanning electron microscopy The SnO2 film cross section and surface morphology were observed.