论文部分内容阅读
利用椭偏仪和光谱仪研究了结晶程度对 Ge2 Sb2 Te5相变薄膜光学常数的影响 .当初始化仪转速固定时 ,随激光功率的增加 ,折射率基本随之减小 ,消光系数逐渐增大 ,透过率逐渐减小 ;当激光功率固定时 ,随转速的增大 ,折射率也随之增大 ,消光系数随之减小 ,透过率逐渐增加 .非晶态与晶态间的变换、薄膜微结构的变化 (包括原子间键合状态的变化 )以及薄膜内残余应力是影响 Ge2 Sb2 Te5相变薄膜复数折射率的主要原因 .测量了 CD- RW(可擦重写光盘 )中 Ge2 Sb2 Te5薄膜非晶态和晶态的反射率
The influence of the degree of crystallization on the optical constants of Ge2Sb2Te5 phase-change film was investigated by ellipsometry and spectrometer. When the initializer speed was fixed, the refractive index decreased with the increase of laser power, and the extinction coefficient increased gradually. When the laser power is fixed, with the increase of rotational speed, the refractive index also increases, the extinction coefficient decreases, the transmittance increases gradually.The transformation between amorphous and crystalline, thin film The change of the microstructure (including the change of bonding state between atoms) and the residual stress in the film are the main factors that affect the complex refractive index of the Ge2Sb2Te5 phase-change film. The Ge2Sb2Te5 Film amorphous and crystalline reflectivity