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提出了基于阴极优化的微细阵列圆柱凸台群电极电化学腐蚀加工法。根据电化学腐蚀基本原理,通过有限元方法分析计算群电极电化学腐蚀加工过程中的电极表面电场分布,以电流密度分布均匀性为目标,优化设计阴极形状,并进行阵列群电极制备。在制备出直径均匀的阵列群电极的基础上,探索用局部涂胶保护法制备大长径比的盘状阵列群电极,用于微细孔电解加工,进一步提高电解加工的定域性。
A cathode array optimization method based on micro-array cylindrical boss group electrode electrochemical corrosion machining is proposed. According to the basic principle of electrochemical corrosion, the electric field distribution on the electrode surface during the electrochemical corrosion process of the group electrode was calculated and analyzed by the finite element method. The current density distribution uniformity was taken as the goal. The cathode shape was optimized and the electrode of the array group electrode was prepared. On the basis of preparing array electrode with uniform diameter, we explored the preparation of large aspect ratio disk array electrode by local coating protection method, which is used for micro-hole electrolysis processing to further improve the electroplating localization.