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将快速傅里叶变换(FFT)与线性调频Z变换(CZT)联合变换的方法应用到法布里-珀罗(F-P)腔传感器的解调中,从理论上分析了该方法的解调原理及误差。模拟计算得出,该联合算法解调出的腔长的相对误差达到0.01%,腔长的最大绝对误差小于0.05μm。在对测量范围为0~3 MPa的F-P腔微机电系统(MEMS)压力传感器进行的解调试验中,该算法可以辨别0.01 MPa的压力,腔长与压力数据的拟合度为0.99316,测量压力与实际压力的标准偏差小于0.005 MPa。实验结果表明,FFT与CZT联合解调的方法可以在较少计算量的基础上达到较高的精度,满足实际需求。
The method of joint transformation of Fast Fourier Transform (FFT) and Linear Chirp Z Transform (CZT) is applied to the demodulation of Fabry-Perot (FP) cavity sensors. The demodulation principle of this method is theoretically analyzed And error. The simulation results show that the relative error of cavity length demodulated by the joint algorithm reaches 0.01%, and the maximum absolute error of cavity length is less than 0.05μm. In the demodulation experiment of FP cavity MEMS sensor with the measuring range of 0 ~ 3 MPa, the algorithm can distinguish the pressure of 0.01 MPa, the fitting of the cavity length and the pressure data is 0.99316, the measured pressure The standard deviation from the actual pressure is less than 0.005 MPa. The experimental results show that the method of joint demodulation between FFT and CZT can achieve higher accuracy on the basis of less computation and meet the actual demand.