超导谐振腔是超导加速器的关键部件 .用于重离子超导加速器的低β加速腔的最佳选择是四分之一波长谐振腔 (QWR) .目前 ,利用无氧铜为基底 ,溅射一层几微米厚的铌膜 ,可以获得极好的超导性能和加速离子性能 .但是 ,四分之一波长谐振腔的内表面复杂 ,溅射均匀的铌膜比较困难 .针对此难题 ,发展了一种多参数可调节的溅射方法 ,在 64 0×2 2 0的大型腔体内 ,成功地生成了一层均匀的、超导性能优异的铌膜 .超导腔的低温实验表明铌膜的性能良好 . Superconducting resonators are a key component of superconducting accelerators, and the best choice for low-beta accelerators for heavy ion superconductors is the quarter-wavelength resonator (QWR). Currently, sputtering using oxygen-free copper as the substrate However, it is more difficult to sputter a niobium film because the inner surface of the quarter-wavelength cavity is complex and the uniform niobium film is difficult to sputter.Aiming at this problem, A multi-parameter adjustable sputtering method has been developed to successfully produce a uniform, superconducting niobium film in a large cavity of 64 × 200 × 220. Low-temperature experiments of superconducting cavities show that The performance of niobium film is good.