基于表面等离子体共振 (SPR)的纳米定位装置可以实现纳米级的定位分辨率和重复性。通过设计特殊四面体棱镜 ,使四面体棱镜第一个反射面的入射角等于SPR的共振角 ,在该反射面上镀上金属膜 ,后面放置光纤探头构成SPR定位指零装置 ,实现了纳米定位装置和干涉仪系统的集成。干涉仪测量前利用SPR纳米定位系统确定一个零位 ,当发生漂移时回到定位零点进行读数校正 ,就可以减少干涉仪的漂移误差。建立了集成纳米定位装置的干涉仪系统。实验表明 ,干涉仪的测量不确定度从 70nm减小到 10nm ,提高了系统的测量精度和稳定性 Nanopositioning devices based on surface plasmon resonance (SPR) can achieve nanoscale positioning resolution and repeatability. By designing a special tetrahedral prism, the incident angle of the first reflecting surface of the tetrahedral prism is equal to the resonance angle of the SPR, a metal film is plated on the reflecting surface, and a fiber optic probe is disposed behind to form an SPR pointing and pointing device to achieve nano-positioning Device and interferometer system integration. Interferometer SPR Nano positioning system to determine a zero before measurement, when the drift back to the zero position for reading correction, you can reduce the interferometer drift error. An interferometer system with integrated nano-positioning device was established. Experiments show that the measurement uncertainty of the interferometer is reduced from 70nm to 10nm, which improves the measurement accuracy and stability of the system