中国真空学会真空物理、真空获得两个专业委员会今天联合召开现代涡轮分子泵和低温泵的研讨会,我感到非常高兴。这是两个十分重要的泵种。大家知道,在超高真空获得方面,实际上现在经常使用而且估计比较有前途的真空泵只有三种:第一是溅射离子泵,通常叫冷钛泵或潘宁泵;第二是涡 China Vacuum Society vacuum physics, vacuum two professional committees today held a joint seminar on modern turbopumps and cryogenic pumps, I am very pleased. This is two very important pumps. As we all know, there are only three types of vacuum pumps that are commonly used and estimated to be more promising in terms of ultrahigh vacuum: the first is a sputter ion pump, usually called a cold titanium pump or a Penning pump; the second is a vortex