,Comparison of Properties of Pt/PZT/Pt and Ru/PZT/Pt Ferroelectric Capacitors

来源 :中国物理快报（英文版） | 被引量 : 0次 | 上传用户：mn012love

【摘要】

：

Pb(Zr0.4Ti0.6)O3 film prepared by sol-gel spin coating on a Pt/Ti/SiOn/Si substrate is applied to ferroelectric capacitors with Pt or Ru as the top electrode.

【作者】

：

JIA Ze REN Tian-Ling LIU Tian-Zhi HU Hong ZHANG Zhi-Gang XIE Dan LIU Li-Tian

【机构】

：

Institute of Microelectronics, Tsinghua University, Beijing 100084

【出处】

：

中国物理快报（英文版）

【发表日期】

：

2006年4期

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Pb(Zr0.4Ti0.6)O3 film prepared by sol-gel spin coating on a Pt/Ti/SiOn/Si substrate is applied to ferroelectric capacitors with Pt or Ru as the top electrode.

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,Comparison of Properties of Pt/PZT/Pt and Ru/PZT/Pt Ferroelectric Capacitors

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