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本文简单介绍了非线性晶体相位匹配和铌酸锂光波导准相位匹配倍频原理，开展了扫描电子显微镜电子束辐照反转极化实验，分析了实验结果，摸索出合适的工艺条件，证明利用扫描电镜可以加工出满足准相位匹配条件的电畴反转光栅
In this paper, the principle of non-linear crystal phase matching and quasi-phase matching of lithium niobate waveguide are introduced briefly. The experiment of reverse polarization of electron beam irradiation by scanning electron microscope (SEM) is carried out. The experimental results are obtained and the suitable process conditions are proved. The use of scanning electron microscopy can be processed to meet quasi-phase matching conditions of the domain inversion grating