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研制极大望远镜的拼接主镜时,为使得望远镜系统成像质量达到衍射极限,子镜的定位精度需要满足共相位要求,那么必须对子镜之间的平移误差进行实时精确检测和校正。在对色散条纹检测和色散哈特曼检测原理分析的基础上,建造了一台色散条纹传感器,并在室内拼接镜面主动光学实验系统上开展检测实验,验证了检测信号和平移误差之间存在确定的函数关系,可实现对平移误差的间接测量。针对实验结果分析了误差产生的原因,总结了影响检测精度的主要因素有:条纹对比度、光谱曲线定标、非线性最小二乘法,并提出了解决方案,以完善数据处理的计算方法。在±15μm的测量范围内,可达到20 nm的检测精度。
In order to make the imaging quality of the telescope reach the diffraction limit and the positioning accuracy of the sub-mirror needs to meet the requirement of co-phase when developing the main mirror of the telescope, it is necessary to accurately detect and correct the translation errors between the sub-mirrors in real time. Based on the analysis of dispersion fringe detection and dispersive Hartman detection principle, a dispersive stripe sensor was built and the experiment was carried out on the test system of the active optical system of the stitching specular mirror, which verified the existence of the determination between the detection signal and the translation error Of the functional relationship, you can achieve an indirect measurement of translation error. According to the experimental results, the causes of the errors are analyzed. The main factors affecting the detection accuracy are summarized as follows: fringe contrast, spectral curve calibration and nonlinear least square method, and the solutions are proposed to improve the calculation method of data processing. In ± 15μm measurement range, up to 20 nm detection accuracy.