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针对多晶硅生产中废气处理工艺存在的问题其进行改造,改造后废气中约有92.1%的氯硅烷被回收利用,碱液的月平均消耗量减少约500 t;放空气体中有毒有害成分的质量分数由17.6%降至0.08%;着火和爆炸事故等安全问题已彻底消除,生产系统的稳定性得到改善,多晶硅的月均产量和产品合格率分别提高约13.8%和4.7%。
In order to solve the existing problems of the exhaust gas treatment process in polycrystalline silicon production, some 92.1% of the chlorosilanes in the exhaust gas were recycled and the average monthly consumption of lye reduced about 500t. The mass fraction of toxic and harmful components in the vent gas From 17.6% to 0.08%; safety issues such as fire and explosion accidents have been completely eliminated and the stability of the production system has been improved. The average monthly production of polycrystalline silicon and the passing rate of products have increased by about 13.8% and 4.7% respectively.