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用能量为２．８ＭｅＶ、剂量为１．４×１０１６ｉｏｎ／ｃｍ２的Ｈｅ＋在室温（３００Ｋ）下注入到晶体材料ＬｉＴａＯ３中，形成了离子注入平板光波导。用棱镜耦合法观察和测量了ＬｉＴａＯ３波导导模的分布，并对退火前后的ＬｉＴａＯ３波导的折射率分布进行了计算和比较。利用背散射／沟道技术分析了由于Ｈｅ＋的注入而引起的波导表面的损伤。
Implanted into the crystalline LiTaO3 at room temperature (300K) with He + at an energy of 2.8 MeV and a dose of 1.4 × 10 16 ion / cm 2, an ion-implanted slab waveguide was formed. The prism coupling method was used to observe and measure the distribution of the LiTaO3 waveguide. The refractive index distribution of the LiTaO3 waveguide before and after annealing was calculated and compared. The backscattering / channel technique was used to analyze the damage of the waveguide surface due to the implantation of He +.