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论述了一种新型气动传感器——气针式传感器的静特性。气针式传感器的研制将使气动测量技术用于高精度测量场合成为可能。该传感器的测量范围为±１０μｍ，整个测量系统精度可达±０．０９μｍ．对系统经过进一步完善后，预计测量精度可达±０．０５μｍ．
Discusses the static characteristics of a new type of pneumatic sensor-gas needle sensor. The development of gas needle sensor makes it possible to use pneumatic measurement technology in high-precision measurement occasions. The sensor measurement range of ± 10μm, the entire measurement system accuracy of ± 0.09μm. After the system is further improved, the measurement accuracy is expected to reach ± 0.05μm.