采用外部电极电容耦合的RF辉光放电装置研究了乙烯基三甲基硅烷(VTMS)与苯(Bz)、苯乙烯(St)以及六氟丙烯(HFP)的等离子体共聚合。用IR、ESCA、PGC/MS和X射线对聚合物结构进行表征,证明乙烯基三甲基硅烷与苯、苯乙烯以及六氟丙烯可进行共聚合。C/Si比的增加表明苯、苯乙烯和六氟丙烯的嵌入导致聚合物组成的变化,Si含量相对较低。共聚物中无Si-H键的形成。 The plasma copolymerization of vinyltrimethylsilane (VTMS) with benzene (Bz), styrene (St) and hexafluoropropene (HFP) was investigated using RF electrodeposition with external electrode capacitive coupling. Characterization of the polymer structure by IR, ESCA, PGC / MS and X-ray proved that vinyltrimethylsilane copolymerized with benzene, styrene and hexafluoropropylene. The increase in C / Si ratio indicates that the embedding of benzene, styrene and hexafluoropropylene results in a change in the composition of the polymer with a relatively low Si content. No Si-H bond formation in the copolymer.