一、概述化学气相沉积法经过多年研究和生产实践,证明它是一种行之有效的表面强化热处理新工艺。在许多情况下,采用这种方法可以得到比其他传统工艺更具特色的表面性能,从而使工具、模具的使用寿命提高3～10倍,而且这种方法,可得到 TiC 等多种涂层。所谓化学气相沉积法碳化钛工艺,是用高纯氢做载气。把四氯化钛和碳氢化合物(例 First, an overview Chemical vapor deposition after years of research and production practices, it is proven that it is an effective surface heat treatment of new technology. In many cases, the surface properties that are more characteristic than other conventional processes can be achieved using this method, resulting in a 3- to 10-fold improvement in tooling and tooling life, and in this method, coatings such as TiC are available. The so-called chemical vapor deposition of titanium carbide process, is to use high-purity hydrogen carrier gas. Titanium tetrachloride and hydrocarbons (example