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在刀具上沉积类金刚石(DLC)薄膜的关键技术问题是如何提高DLC薄膜的附着力,以发挥DLC薄膜在刀具涂层领域的优势。本文通过对微型钻头表面进行不同的化学预处理后利用射频等离子体化学气相沉法沉积DLC薄膜,对影响膜基附着力的内在规律进行了探讨。结果表明:采用简单酸碱腐蚀(先后使用NaOH溶液和HNO3溶液进行腐蚀)对DLC薄膜附着力的提高有一定作用,而综合腐蚀(首先使用酸碱腐蚀,然后使用Murakami试剂腐蚀)的效果更佳;此外,使用Murakami试剂腐蚀时间过长(超过6 min)会影响钻头本体的机械强度。实验结果对于DLC薄膜作为微型钻头涂层的应用具有很好的指导意义。
The key technical issue in depositing diamond-like carbon (DLC) films on tools is how to improve the adhesion of DLC films to take advantage of DLC films in tool coating. In this paper, different chemical pretreatment of micro-drill surface after the use of radio frequency plasma chemical vapor deposition deposition DLC film, film adhesion on the inherent law. The results show that the simple acid-base corrosion (using NaOH solution and HNO3 solution for corrosion) has some effect on the adhesion of DLC film, and the comprehensive corrosion (using acid-base corrosion and then Murakami reagent) is more effective In addition, corrosion with the Murakami reagent for an extended period of time (longer than 6 min) can affect the mechanical strength of the drill body. The experimental results have very good guiding significance for the application of DLC film as a micro-drill coating.