激光双焦干涉表面微观轮廓仪在测量原理上首次实现完全共路干涉和无需参考面的突破，为在加工现场对超光滑表面的实时检测提供了可能。本文论述了一种产品化的双焦干涉平面微观轮廓仪的测试原理和控制过程，着重介绍其软件的功能结构和关键算法，最后给出了和进口Ｗｙｋｏ轮廓仪比对的结果。 The laser Bifocal interferometer surface micro-profiler achieves, for the first time in measurement principle, a complete common-path interference and a breakthrough without reference surface, making it possible to detect ultra-smooth surfaces in real time at the machining site. This paper discusses the testing principle and control process of a commercial bifocal interferometric planar profiler, emphasizes the functional structure and key algorithms of the software, and finally gives the results of comparison with the imported Wyko profiler.