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最近十年中,固体表面分析方法获得了迅速的发展,它是目前分析化学领域中最活跃的分支之一。它的发展与催化研究、材料科学和微型电子器件研制等有关领域内迫切需要了解各种固体表面现象密切相关。各种表面分析方法的建立又为这些领域的研究创造了很有利的条件。在表面组分分析方法中,除化学分析用电子能谱(ESCA)以外,俄欧电子能谱是最重要的一种。目前它已广泛地应用于化学、物理、半导体、电子、冶金等有关研究领域中。本文简单介绍俄歇电子能谱(以下简称 AES)的原理、仪器和化学应用。
In the last ten years, the solid surface analysis method has gained rapid development. It is one of the most active branches in the field of analytical chemistry. Its development is closely related to the urgent need to understand various solid surface phenomena in related fields such as catalytic research, materials science and the development of microelectronic devices. The establishment of various surface analysis methods has created very favorable conditions for the research in these fields. In the surface composition analysis method, in addition to chemical analysis of electron spectroscopy (ESCA), the Russian-European electron spectroscopy is the most important one. It has been widely used in chemical, physical, semiconductor, electronics, metallurgy and other related fields of research. This article briefly introduces the principle, instrumentation and chemical applications of Auger electron spectroscopy (AES).