论文部分内容阅读
Ⅰ引言已发表的关于测量真空中预击穿稳态电流的大部分文章,都根据Fowler-Nordheim场致发射方程加以说明。提出利用大“场强化因子”β来解释击穿前所观察到的高电流。然而,却很少讨论例如由于排气方法而引起的有机污染的程度。也未确定阳极轰击时所放出的气体的作用。下面叙述的在用油泵排气和离子泵排气的两个真空器室里所作的一系列实验,是为了证明在不同工作条件下预击穿电流的组成成份
I. INTRODUCTION The majority of published articles on the measurement of the steady state pre-breakdown current in a vacuum are described according to the Fowler-Nordheim field emission equation. It is proposed to use the large “field strengthening factor” β to explain the high current observed before breakdown. However, the extent of organic contamination, for example due to the method of venting, is seldom discussed. The effect of the gas released during the bombardment of the anode was also undetermined. A series of experiments described below in two vacuum chambers using an exhaust pump and an ion pump to evacuate were used to demonstrate that the composition of the pre-break-through current under different operating conditions