论文部分内容阅读
为了提高激光反射膜的光谱特性和抗激光损伤特性,提出了一种高损伤阈值激光反射镜的设计方法:采用HfO2-Nb2O5-SiO2多材料混合膜系结构,利用Nb2O5-SiO2折射率差值大的特点,在较少的膜层数下达到高反射率要求;利用HfO2-SiO2组合具有高的抗激光损伤特点,在Nb2O5-SiO2膜堆的最外部分叠加HfO2-SiO2膜堆,取长补短,做到采用较少的膜层数,达到高反射率要求,同时提高薄膜的抗激光损伤能力。该方法能灵活有效地按照不同膜系要求进行材料组合,具有很高的实用价值,达到工程最优化设计。
In order to improve the spectral characteristics and laser damage resistance of the laser reflective film, a high damage threshold laser mirror design method is proposed: a HfO2-Nb2O5-SiO2 multi-material mixed film structure is used, and the difference of the refractive index of the Nb2O5- . The HfO2-SiO2 composite has a high resistance to laser damage. The HfO2-SiO2 film stack is superimposed on the outermost part of the Nb2O5-SiO2 film stack, so as to make up for each other’s strengths and weaknesses. To the use of fewer film layers, to achieve high reflectivity requirements, while improving the anti-laser film damage ability. The method can flexibly and effectively perform material combination according to requirements of different film systems, has high practical value, and achieves engineering optimal design.