SOI(Silicon on Insulator)指绝缘体上的硅技术,是为适应航空航天电子需求而发展起来的高新技术。近年来,随着信息技术高速发展,对LSI的高速、高集成度、高机能,特别是低功耗要求愈来愈苛刻,特别是对用电池驱动的携带式如手机等信息终端机领域。低功耗要求低电压工作,更低电压工作则由射线引进的软失误又成了大问题。因此,从民用角度出发, SOI (Silicon on Insulator) refers to the insulator on the silicon technology is to meet the needs of aerospace electronics and the development of high-tech. In recent years, with the rapid development of information technology, the requirements for high speed, high integration, high performance, and especially low power consumption of LSI have become more and more stringent, especially for battery-driven portable terminal devices such as cell phones. Low-power requirements of low-voltage work, lower voltage work by the introduction of soft-ray error has become a big problem. Therefore, from a civilian point of view,