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基于微纳制造、微电子等技术的传感器芯片系统具有体积小、质量轻、功耗低、易于批量化生产、成本低、易于集成化等优点,是传感技术领域的一个重要研究方向。近年来相关的研究主要包括微纳传感器芯片、微传感器阵列、多传感器集成芯片系统、传感器与电路集成芯片系统、微流控芯片系统、无线网络传感器节点芯片系统等。文中分别以糖化血红蛋白免疫传感器、催化燃烧气体传感器和电场传感器为例,简要介绍若干典型的生物量、化学量和物理量微传感器系统及其应用。
The sensor chip system based on micro-nano manufacturing and microelectronics technology has the advantages of small size, light weight, low power consumption, easy mass production, low cost and easy integration. It is an important research direction in the field of sensor technology. In recent years, related research mainly includes micro-nano sensor chip, micro sensor array, multi-sensor integrated chip system, sensor and circuit integrated chip system, microfluidic chip system and wireless network sensor node chip system. Taking the HbA1c, the catalytic combustion gas sensor and the electric field sensor respectively as examples, some typical micro-sensor systems of biomass, chemical and physical quantities and their applications are briefly introduced.