通过重复阳极氧化实验,研究了钽的阳极氧化过程中的击穿损伤。本文介绍一种解释,假设由于击穿过程产生非短路微孔的形成。根据此模型计算损伤面积的大小和微孔的深度。 Through repeated anodization experiments, the breakdown of tantalum during anodic oxidation was studied. This article presents an explanation that assumes the formation of non-short-circuited micropores due to the breakdown process. According to this model, the size of damaged area and the depth of micropore were calculated.