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本文采用离子束辅助沉积技术(IBAD)制备一系列碳膜,重点分析添加合金元素(Ti,Cr,Ni)对薄膜性质的影响。实验结果表明添加Ti,Cr,Ni元素对碳膜厚度,硬度无明显影响,但提高了薄膜的结合强度,其中加入Ni后,薄膜的结合强度最好;添加合金元素可以显著减小碳膜的摩擦系数;添加Ti元素碳膜的组织以非晶态为主,与纯碳膜相当。相对于类金刚石薄膜,本实验制备的碳膜试样更接近于类石墨膜。
In this paper, a series of carbon films were prepared by ion beam assisted deposition (IBAD) technology, with emphasis on the influence of adding alloying elements (Ti, Cr, Ni) on the properties of the films. The experimental results show that the addition of Ti, Cr and Ni has no obvious effect on the thickness and hardness of the carbon film, but improves the bonding strength of the film. The addition of Ni results in the best bonding strength of the film. Adding alloying elements can significantly reduce the carbon film Friction coefficient; The structure of Ti element added with carbon film is mainly amorphous, equivalent to pure carbon film. Compared with diamond-like carbon film, the carbon film sample prepared in this experiment is closer to graphite-like film.