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我们提出了一个用于模拟SIMOX注入分布的经验公式,用此公式对某些氧注入分布进行了模拟,其结果与有关理论计算及实验值相比符合较好.我们的经验公式既有一定精度又形式简单,非常适合于作为VLSI全工艺模拟器中的一部份.
We present an empirical formula for simulating SIMOX injection distribution and use this formula to simulate some oxygen injection distributions, which is in good agreement with the theoretical calculations and experimental results. Our empirical formulas have some accuracy It is also simple in form and ideal for use as part of VLSI full process simulators.