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为了降低环形腔的环境振动敏感度,设计了一个四柱支撑环形腔。利用有限元数值模拟的方法,通过改变支柱的支撑位置和支柱直径,对环形腔进行数值模拟,得到了环形腔光程变化量随各参数变化的关系曲线。结果表明,通过选择适当的支撑位置和支柱直径,可以使得光程变化量趋近零,光程对振动不敏感。该方法对于高稳定环形腔的设计具有重要的指导意义。
In order to reduce the environmental vibration sensitivity of the annular cavity, a four-post support ring cavity is designed. By means of finite element numerical simulation, the annular cavity is numerically simulated by changing the support position and the diameter of the strut, and the relationship between the variation of the optical path of the annular cavity and each parameter is obtained. The results show that by choosing proper support position and pillar diameter, the optical path variation can approach zero and the optical path is insensitive to vibration. This method is of great significance to the design of highly stable annular cavity.