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考虑到基底原子位置高低不等和位置无序等现象引起的基底与吸附原子之间相互作用能的非均一性对三维薄膜初期生长二层以上原子的影响,本文建立了一个非均匀基底上的三维薄膜初期生长模型,研究了FCC(100)衬底上沉积速率、沉积能量、非均一性离散程度和分布形态等因素对三维薄膜初期生长的影响。由于基底非均匀分布的无规则性,文中将其拟合为一定范围内的随机分布。模拟结果显示:中等温度(T=450K)下相互作用能的非均一性对三维薄膜的初期生长有显著的影响;适当的增加基底不均一性离散程度和分布形态的凹凸程度对薄膜初期生长机制和岛数目都有重要影响。
Considering the influence of the heterogeneity of the interaction energy between the substrate and the adsorbed atoms on the atomic number of the second layer above the initial growth of the three-dimensional thin film due to the unevenness of the atomic positions of the substrates and the disordered positions, an inhomogeneous substrate The effects of deposition rate, deposition energy, degree of heterogeneity and distribution on FCC (100) substrate on the initial growth of three-dimensional thin films were investigated. Due to the irregularity of the non-uniform distribution of the substrate, it is fitted to a random distribution within a certain range. The simulation results show that the heterogeneity of the interaction energy at medium temperature (T = 450K) has a significant effect on the initial growth of the three-dimensional thin films. Appropriate increase of the dispersion degree of the substrate inhomogeneity and the degree of the unevenness of the distribution pattern have an effect on the initial growth mechanism And the number of islands have a significant impact.