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本文介绍采用非光学方法实现剪切力（ｓｈｅａｒｆｏｒｃｅ）检测和轻敲（ｔａｐｐｉｎｇ）模式微振动检测。通过检测压电片上的电压输出，用作探针与样品间距控制信号，实现扫描近场光学显微镜（ＳＮＯＭ）光学探针与样品间距控制。文中给出了探针－压电片检测系统的的频率特性，并比较了剪切力探测和轻敲模式探测特性的区别。在剪切力作用下探针在正负半周振动时受到的作用力是对称施加的，谐振状态受剪切影响，随作用力增大振幅连续减小。而在轻敲模式工作时探针受到非对称力作用，因而在探针的谐振状态与作用力关系（力曲线）上表现出不同特征。采用轻敲方式时存在最佳工作频率，只有在该频率下才能得到合适的力曲线，并获得较好的图像。
This article describes the use of non-optical shearforce (shearforce) detection and tapping mode micro-vibration detection. By detecting the voltage output of the piezoelectric film, used as a probe and sample spacing control signal, to achieve scanning near-field optical microscope (SNOM) optical probe and sample spacing control. In this paper, the frequency characteristics of the probe-piezoelectric film detection system are given, and the differences between the shearing force detection and the tapping mode detection are compared. Under the action of shearing force, the force exerted by the probe during positive and negative half-cycles is symmetrically applied. The resonance state is affected by shearing, and the amplitude decreases continuously with the increase of acting force. However, the probe is subjected to an asymmetric force when working in the tapping mode, thus exhibiting different characteristics on the relationship between the resonance state of the probe and the force (force curve). There is an optimal working frequency when taping is used, and only the proper force curve can be obtained at this frequency, and a better image can be obtained.