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为了从实验上深入研究超热电子产生规律，从而减少或抑制超热电子对惯性约束聚变（ＩＣＦ）的危害，我们制备了一系列薄壁腔靶，以供实验研究。本文详细地描述了柱形薄壁腔靶的制备工艺。利用ＮＧ－１０４型精密单向纵切车床，采用金刚石刀具车削，提高心轴质量，表表粗糙度可达０．１μｍ。采用电镀和磁控溅射二种方法镀膜，为了使腔靶壁厚均匀，在镀膜时，必须使心轴匀速旋转。利用磁控溅射在腔靶外表面再涂上１μｍ左右厚的二氧化硅，以提高超薄壁腔靶的强度和自立能力。在腐蚀心轴时，必须仔细控制酸的浓度，防止在腐蚀时因产生气泡太多，太快而使腔靶破裂。用Ｘ射线照相法和扫描电子显微镜测量腔靶的几何参数。制备系列柱形薄壁腔靶达到指标为：壁厚范围２～３０μｍ，壁厚均匀性小于１０％，表面粗糙度０．２～０．３μｍ。最后介绍了在“神光Ⅰ”上打靶结果。结果表明，实验值与理论值符合较好。
In order to further study the law of generation of superheated electrons experimentally and thereby reduce or suppress the harm of superheated electrons to inertial confinement fusion (ICF), we have prepared a series of thin-walled cavity targets for experimental study. This paper describes the preparation of cylindrical thin-walled cavity target in detail. Using NG-104 precision one-way longitudinal lathe, the use of diamond turning tool to improve the quality of the mandrel, the surface roughness of the table up to 0.1μm. Electroplating and magnetron sputtering using two methods of coating, in order to make the cavity wall thickness uniform, in the coating, the mandrel must be rotated at a uniform speed. Magnetron sputtering is used to coat the outer surface of the target with about 1μm thick silica to improve the strength and self-supporting ability of the ultrathin wall cavity target. In the corrosive mandrel, the acid concentration must be carefully controlled to prevent the target from rupturing due to too much air bubbles and too fast corrosion during corrosion. The geometrical parameters of the cavity target were measured by X-ray radiography and scanning electron microscopy. The series of cylindrical thin-walled cavity targets achieved the following targets: wall thickness range 2 ~ 30μm, wall thickness uniformity less than 10% and surface roughness 0.2 ~ 0.3μm. Finally introduced in the “Shenuang Ⅰ” shooting results. The results show that the experimental value is in good agreement with the theoretical value.