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波导隔离球用Ce：YIG磁光薄膜可由溅射外延或溅射波积后热处理结晶化两种方法制各．探讨了制备过程中不同工艺条件对薄膜结晶性能及磁光特性的影响。
Waveguide ball with Ce: YIG magneto-optical thin film can be sputtered epitaxial or sputter wave heat treatment after crystallization of the two methods of each system. The effects of different process conditions on the crystallization and magneto-optical properties of the films were discussed.