利用高分子共混物的微相分离和自组装原理,制备出具有纳米微孔的PMMA薄膜,以此为掩膜对发光二极管(LED)表面进行湿法腐蚀,得到表面微结构,并研究了腐蚀时间对表面形貌的影响。测试结果表明,当微孔直径在500nm左右、腐蚀深度约140nm时,所得到的表面微结构能使LED在20mA的注入电流下光功率平均提高18%。 Using the principle of micro-phase separation and self-assembly of polymer blends, a PMMA thin film with nano-pores was prepared, which was used as a mask to wet-etch the LED surface to obtain the surface micro-structure. Effect of etching time on the surface morphology. The test results show that when the diameter of micropores is about 500 nm and the etching depth is about 140 nm, the resulting surface microstructure can improve the LED power averagely by 18% at 20 mA injection current.